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Laser Beam Size Measurement Technique

IP.com Disclosure Number: IPCOM000063748D
Original Publication Date: 1985-Apr-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Luecke, FS [+details]

Abstract

This article describes a technique for the measurement of the size of a focused laser beam showing some astigmatism. A pattern having alternating features 1, 2 oriented at 90 degrees with respect to each other is made with contrasting materials, for example, chrome deposited on glass. The pattern is scanned or vibrated relative to the laser beam, being measured, at an angle of 45 degrees to the pattern. The amount of reflected and/or transmitted light is measured. This allows simultaneous measurement of the beam profile in both transverse axes, which is especially useful with lasers or laser systems which are astigmatic.