Oxygen Implantation to Fabricate Late Personalization Mosfet Devices
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18
Conventional FET (field-effect transistor) read-only memory arrays are fabricated on large-scale integrated circuit chips so as to incorporate a selected pattern of binary information bits. A separate part number is required for the fabrication of each respective pattern of binary bits, and this can increase the relative cost of manufacture and can increase the turnaround time necessary to implement a particular desired binary bit pattern. The invention disclosed herein provides for the fabrication of read-only memory chips without the personalization of the binary pattern in the array.