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Cylindrical Multi-Substance Evaporation Apparatus

IP.com Disclosure Number: IPCOM000063900D
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Bross, A Schink, K VanSteenburgh, JJ Yang, RM [+details]

Abstract

This article describes an apparatus to simultaneously deposit more than one substance through the evaporation phenomenon on a substrate. This apparatus produces a homogeneous layer with the desired characteristics, containing the proper amount of each substance. The apparatus is constructed using concentric quartz cylinders 1 separated symmetrically by appropriate air gaps 2 sufficient to provide nominal thermal insulation between the cylinders. Heating elements 3 and temperature monitoring and control thermocouples 4 are inserted into each chamber and each one separately controlled from the proper external equipment.