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Product Particulate Contamination Inspection System

IP.com Disclosure Number: IPCOM000063928D
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Potenzieri, R Rapa, AC Todoroff, JA [+details]

Abstract

This apparatus permits surface contamination to be detected which cannot be seen under normal lighting conditions by either the unaided eye or by a microscope. In particular, the problems addressed are detecting small particulate matter within dense semiconductor patterns and on multilayer ceramic (MLC) greensheet, where the surface background scatters the light. The main feature which permits detection of particles under these conditions is the design of a lower tier 10 (Fig. 1) of lights 12. The lower tier 10 of lights 12 is arranged in a square, as shown in Fig. 2. The lens end lamps are fixed to a housing 14 at a 0Πincidence angle. This provides a significant improvement over the prior art [*].