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Semiconductor Laser Diode Array Used in Thin Film Redistribution

IP.com Disclosure Number: IPCOM000064014D
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Bennett, WO [+details]

Abstract

This disclosure describes the utilization of a semiconductor laser diode array as an optical exposure unit in the normalization process of via distributors in multilayer ceramic substrate fabrication. It is also anticipated that the diode array could also be used to repair other pattern faults, such as opens or shorts. It further describes the possible use of the array as an information display device being driven by a computer. The present disclosure is aimed at replacing a very complex manufacturing tool (mapper stepper) used in thin film technology manufacturing with a computer-driven high-density solid-state laser diode array. The laser diode array pattern output, being developed by a computer program, can be changed rapidly simply by changing the output signals of the computer X and Y drive circuit.