Rotary Reticle Changer for Projection Mask Aligners
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18
This article relates generally to projection mask aligners used in the fabrication of integrated circuits and more particularly to reticle changers for such aligners. Still more particularly it relates to a rotatable reticle carrier with precision longitudinal positioning and lateral error readout techniques. This article discloses a rotary reticle changer for projection mask aligners. Fig. 1 shows a top view and a cross-sectional side view of a rotary reticle changer. In Fig. 1, reticles 1 are loaded onto a circular carrier 2 which can be rotated to bring the desired reticle 1 into the printing position. A 45Œ mirror 3 folds the horizontally incident light on the vertical reticle into a vertical beam for impingement on a vertically mounted imaging lens and a horizontal wafer (not shown).