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Rotary Reticle Changer for Projection Mask Aligners

IP.com Disclosure Number: IPCOM000064020D
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Hill, RW Lin, BJ [+details]

Abstract

This article relates generally to projection mask aligners used in the fabrication of integrated circuits and more particularly to reticle changers for such aligners. Still more particularly it relates to a rotatable reticle carrier with precision longitudinal positioning and lateral error readout techniques. This article discloses a rotary reticle changer for projection mask aligners. Fig. 1 shows a top view and a cross-sectional side view of a rotary reticle changer. In Fig. 1, reticles 1 are loaded onto a circular carrier 2 which can be rotated to bring the desired reticle 1 into the printing position. A 45Πmirror 3 folds the horizontally incident light on the vertical reticle into a vertical beam for impingement on a vertically mounted imaging lens and a horizontal wafer (not shown).