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Method to Minimize Aluminum Oxide Particle Deposition During Ceramic Firing

IP.com Disclosure Number: IPCOM000064032D
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Brandis, EK Herron, LW Lewis, RK Ordonez, FM [+details]

Abstract

Undesirable aluminum oxide particles and debris have been found on the surfaces of ceramic substrates after firing. These particles cause difficulty in subsequent substrate processing steps, such as plating. The method described to minimize this problem uses a frame surrounding the edges of the substrates to prevent the furnace gas flow from directly impinging upon the substrate edges. The frame sectional shape makes the gas flow in a more laminar rather than turbulent fashion. The method is based on findings which indicate that the undesired particles come mostly from the edges and appear to be carried by the turbulent flow of the furnace gas caused by the gas striking the substrate edges. The particles are then deposited on the substrate top surface. Fig. 1 shows a top and sectional view of the substrate 1 and the frame 2.