Modified Wafer Carrier With Locking Feature
Original Publication Date: 1985-May-01
Included in the Prior Art Database: 2005-Feb-18
This article describes a modification to a standard semiconductor process wafer carrier or boat that locks the wafers in place and prevents spilling of the wafers during process operations. The retention feature is a comb-like movable gate 10 that is physically located above the center line of the wafers 12. When gate 16 is closed and locked in place, the wafers 12 cannot be removed from the carrier 14. When the gate is unlocked and moved laterally away from the wafers, the clearances are sufficient to allow the wafers to be removed either by hand or automatically. In the closed position the movable gate 10 does not make contact with the wafers but prevents them from being removed by not allowing sufficient clearance determined by the diameter of the wafers. The gate is lubricated with the same material as the boat.