Automatic Location and Recording System for Semiconductor Chip Sites
Original Publication Date: 1985-Jun-01
Included in the Prior Art Database: 2005-Feb-18
A precision, automatic position location and recording system for the mapping of semiconductor chip sites on a multichip substrate, which utilizes a non-contact optical electronic subsystem to locate the chip site, and the digitized x- and y-axis output signals from a servo- driven x and y position table to determine site location on the substrate. A substrate 1 is located precisely on an x-y table 2 by utilizing locator holes or substrate edges, and is clamped into position. The calibration of the system is aided by the use of cross hairs that are built into the optical or video read-out equipment 3 to permit observation of the actual substrate location by an operator. Validation of chip sites is accomplished by the use of a collimated light source and a diode array in an image reference system 4.