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Laser Jet Plating

IP.com Disclosure Number: IPCOM000064288D
Original Publication Date: 1985-Jun-01
Included in the Prior Art Database: 2005-Feb-18

Publishing Venue

IBM

Related People

Authors:
Hodgson, R Johnson, M von Gutfeld, R [+details]

Abstract

Laser jet plating is a technique for increasing the rate of deposition over and beyond that achieved by laser-enhanced plating (R.J. von Gutfeld, et al, Appl . Phys . Lett . 43, 876 (1983). This maskless patterning scheme utilizes a pressurized free-standing stream of electrolyte directed through a nozzle at the cathode. A laser beam is focussed into this stream collinearly so that both the light and the fluid are incident on the cathode at the same point. Application of a voltage between the nozzle (anode) and the cathode causes current flow to occur through the stream. The jet thereby serves as a source of rapid resupply, a means for producing localized maskless plating due to the localization current flow at the cathode defined by the crosssectional area of the jet, and as an optical waveguide which confines the light beam.