Piezo-Electrostatic Rotary Drive
Original Publication Date: 1985-Jul-01
Included in the Prior Art Database: 2005-Feb-18
This rotary drive combines the principles of electrostatic clamping and piezoelectric translation. It permits stepwise rotation in the nanometer range, and can operate under UHV conditions. A stationary metal base plate 1 with a concentric hole 2 carries a rotor 3 comprising two semicircular sections 4 and 5 coated on their lower faces with dielectric layers 6 and 7, respectively. Connected to section 5 is a shaft 8 of insulating material, which is received in hole 2 of base plate 1. Section 4 has no direct connection to shaft 8. Sections 4 and 5 are linked by means of two piezoelectric elements 9 and 10 which may be arranged, e.g., on the upper surfaces of sections 4 and 5. Each of the piezoelectric elements 9 and 10 is secured at its ends to both sections 4 and 5.