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Odd-Even Wafer-Carrier Lifting Tool Disclosure Number: IPCOM000064729D
Original Publication Date: 1985-Aug-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue


Related People

Kopecky, HR Rosenfeld, LH [+details]


An attachment to a conventional wafer boat or carrier simplifies wafer inspection and/or wafer removal from the boat or carrier for continued processing steps. The attachment can be fabricated from normal materials and sized to accommodate any size wafer and any size boat. The proposed adapter is designed to have "fingers" to lift every other wafer from the wafer bed to a controlled distance that is based on the dimensions of the carrier. The "fingers" are alternately disposed protrusions bearing V-slots for engaging the wafers. The finger configuration can be designed to engage, as shown, every other wafer, or every third wafer, or any combination to accommodate the processing needs.