Browse Prior Art Database

Mask/Reticle Frame

IP.com Disclosure Number: IPCOM000064739D
Original Publication Date: 1985-Aug-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Peredy, SK [+details]

Abstract

A photo mask/reticle frame design which includes both automatic and manual features useful in the production of integrated circuits (ICs) is highlighted. The frame illustrated, for holding a precision made quartz mask/reticle, is generally "L" shaped in appearance. It includes a auto handler feature, a manual handle and spring clips on diagonally opposite corners for clamping the glass mask in a formed groove. All of these fittings would be moulded into the frame. Alterably, the frame may be made an integral part of the mask/ reticle itself and thus be useful in the manufacture of the mask as well as in the IC fabrication process. Also, the manual handle can be either fixed or detachable.