Carriage and Rail Assembly for Handling Wafer Boats
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19
This article describes a wheeled carriage assembly mounted on rails for handling wafer boats used in a furnace environment for processing integrated circuits. It has a position for cooling down hot wafers, a position for loading/unloading the furnace, and a boat tilting station used by the operator for ease of handling. Fig. 1 illustrates the rail position 1 of the carriage assembly 2 used to store hot boats 3 of newly processed wafers 4. Note the rail detent 5 used to hold the wheeled carriage in position under the furnace hood (not shown). Fig. 2 illustrates the rail position 6 used for an automated elevator pick-up and drop (not shown). A forked beam located on the elevator engages the boat at 7. Fig. 3 illustrates the rail position 8 used for the carriage when the operator loads/unloads a boat or wafers in the boat.