Multi-Pin Probe System for Dielectric Breakdown Measurements
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19
This apparatus uses 64 computer-assisted, individually adjustable probes, instead of conventional fixed probes, for parameter measurements on dielectric plastics, such as polyimides. Details of a single probe are illustrated. The Jack Terminal subsassembly is screwed into the Probe Body and held secure by the Lock Spring. This probe assembly is then inserted into a hole in the Machineable Ceramic, where it is fastened with Cement. The Plunger contacts the specimen under test with a force determined by the Contact Spring. Plunger depth adjustment is made by turning the Jack Terminal against the Lock Spring. Test equipment connection is provided by the Jack Terminal. Testing consists of ramping many capacitor dots on a test wafer. Ramping is required at various temperatures for general and nearest- neighbor effects.