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Air-Tight Door for High Temperature Oxidizing and Diffusing Furnaces

IP.com Disclosure Number: IPCOM000064879D
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Deseez, C Mathieu, M Moissy, J [+details]

Abstract

This air-tight door system is designed for use in all oxidizing and diffusing furnaces and ensures a very good isolation from the atmosphere in automatic furnace-loading devices. It further reduces the risks of sticking due to the phosphorus particles which condense when submitted to the diffusion process. The air-tight collar is provided with two mirror-polished faces. The collar is installed onto the tube collar on the assembly line (not shown). The external face thereof is provided with a circular groove connected to an output, and vacuum is applied when the process is executed. An air-tight mirror-polished door is pressed against the collar and held in position by the vacuum in the collar groove.