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Indicator for Metal Film-Substrate Adhesion

IP.com Disclosure Number: IPCOM000065042D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Guidotti, D Wen, SH [+details]

Abstract

The quality of adhesion of a thin metal film to its substrate can be determined non-destructively without contact from an optically induced thermoreflectance measurement. A change in reflectivity is proportional to the magnitude of the temperature change in the metal as long as the temperature difference is small compared to the ambient lattice temperature. By calibrating the ratio of the change in reflectance (WR) with respect to the reflectance (R) for a thick metal film, a quantitative measure can be provided of the degree of interaction at the metal film- substrate interface.