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Tantalum Source Shield Shipping Container Disclosure Number: IPCOM000065122D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

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Related People

Kopecky, HR Sheerin, CJ Uberbacher, G [+details]


In the course of semiconductor processing, tantalum source shields used in the Cr-Cu-Au evaporator are sent to a metal reclaimer for recovery of gold. Existing procedures in the handling and shipping of the shields resulted in distortions requiring the discarding of a high percentage of them. An invention of a shipping container along with the use of a press has resulted in a higher quality of processing and a savings in cost. The bottom of the container is shown in Fig. 1. This is made of clear polycarbonate and has recesses 2 in its base into which the shields are placed for shipping. A fitted top cover includes a foam pad which engages the shields so they are held gently but snugly in place when being transported. The container bottom is slotted 3 at each end. This accommodates a slotted bar (Fig.