Mask-Alignment Tooling Shipping Container
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19
In semiconductor manufacturing processes, tooling elements have to be frequently transferred to a vendor for cleaning and restoration for re-use. An invention has been made which uses a transfer bar and plastic container to provide a firm, rigid medium for moving the elements between the plant and the vendor. The new method effectively reduces tooling damage which occurred using previous techniques. The mask-alignment tooling to which the invention is addressed requires the transfer of top rings, bottom rings and springs. Each of these has a hollow center, and previously they were stacked on stainless steel tubes, then wrapped in aluminum foil for shipping. There were several deficiencies with this system. The stacks would tend to "nest.