Automatic Carrier Storage and Retrieval Accessor
Original Publication Date: 1985-Nov-01
Included in the Prior Art Database: 2005-Feb-19
A technique is described whereby a storage and accessing mechanism is designed to be used in class 10 clean room environments for the automatic transferring of semiconductor wafers in and out of storage. The automatic carrier storage and retrieval accessor (ACSRA) is unique in that it employs a magnetic suspension system, so as to eliminate exposed bearing surfaces. It provides a drive system completely isolated from a clean atmosphere. The ACSRA, as shown in Fig. 1, consists of top and bottom guide rails 10 for the horizontal axis and dual guide rails 11 for the vertical axis. Dual wafer pickers 12 are mounted on picker carriage 13, which contain four magnetic linear bearings, to provide the wafer-retrieval requirement. The bearings, as shown in Fig.