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Wafer Elevation/Rotation Tool

IP.com Disclosure Number: IPCOM000065344D
Original Publication Date: 1985-Dec-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Springer, LK [+details]

Abstract

The Wafer Elevation/Rotation Tool allows the selection of an individual wafer in a wafer carrier to be raised up and rotated 360Œ. Referring to Fig. 1, the Wafer Elevation/Rotation Tool 10 includes a base member 12 and wheel assembly 14. Wheel assembly 14 consists of two wheels 16, 18 in mutual contact with each other and mounted on a shaft 20 which passes through the center of wheel 16. Shaft 20 can be rotated and moved laterally toward the front or the rear of base 12. Wafer carrier 22 having wafers 24 is positioned on the top of the Wafer Elevation/Rotation Tool 10. To select a wafer for elevation and/or rotation, wheel assembly 14 would be positioned under the desired wafer. Fig. 2 illustrates the relationship between the wheel assembly 14 and shaft 20.