Wafer Pre-Align Station Capable of Pre-Aligning Various Wafer Sizes
Original Publication Date: 1985-Dec-01
Included in the Prior Art Database: 2005-Feb-19
During the semiconductor manufacturing operation, wafers have to be oriented at a pre-alignment station so that serial number reading and probing may take place prior to wafer testing. This article describes a device capable of handling several sizes of wafers in robotic fashion. When wafers are prepared, a V-notch is built-in for positioning purposes. Under prior handling conditions, a manual device was used to hold the wafer in a horizontal position with the wafer being rotated until the notch reached a predetermined position. This invention is an automatic device with the wafer being supported in an almost vertical, slightly inclined position 5 (Fig. 1). A pair of adjustable positioning rollers 1 (Fig. 2) are placed in a set of holes dedicated for the specific wafer size.