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Remote Valve Hand Spray Gun

IP.com Disclosure Number: IPCOM000065562D
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Kern, FW [+details]

Abstract

The use of a spray gun for the dispensing of deionized water and inert gases is common throughout the semiconductor manufacturing industry. As the fluid handled by this device contacts the semiconductor wafers it is essential that it be free of contaminants.