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Remote Valve Hand Spray Gun Disclosure Number: IPCOM000065562D
Original Publication Date: 1985-Jan-01
Included in the Prior Art Database: 2005-Feb-19

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Kern, FW [+details]


The use of a spray gun for the dispensing of deionized water and inert gases is common throughout the semiconductor manufacturing industry. As the fluid handled by this device contacts the semiconductor wafers it is essential that it be free of contaminants.