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Device/Process for the Characterization of a Semiconductor Lithography Tool Disclosure Number: IPCOM000065636D
Original Publication Date: 1985-Apr-01
Included in the Prior Art Database: 2005-Feb-19

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Finnes, S [+details]


This article describes a process where a grid coated with gold is used as the base or substrate of a resist layer onto which a pattern will be exposed and developed for the purpose of improving th e accuracy of characterizing the "Footprint" of the particular tool. In addition, this process could be used to characterize tools designe d to perform overlay measurements.