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A non-invasive tool for making measurements of thin film coil parameters during processing is shown.
English (United States)
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Non-Invasive Tool for Coil Measurement
A non-invasive tool for making measurements of thin film coil parameters
during processing is shown.
The tool comprises a coil 1 which is placed in close proximity to a selected
one of the thin film coils 2 which have been produced on wafer 3. A high
frequency tunable oscillator 4 is connected to the coil 1. When the frequency of
oscillator 4 is swept, the response of the circuit gives the resonant frequency and
Q of the resonant structure, and this response can be viewed on oscilloscope 5.
Various desired parameters of the coils can be inferred from the response curve
shown on oscilloscope 5.