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An improved thin film magnetic head is described in which the spacing of the outermost turns of the coil is widened in the pole-tip area.
English (United States)
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Wider Coil Line Spacing Strategy At Pole-tip Area for Preventing Core
An improved thin film magnetic head is described in which the spacing of the
outermost turns of the coil is widened in the pole-tip area.
In the coil lithography process used in thin film magnetic head fabrication, the
non-uniform resist thickness and topological slope at the pole tip slope area can
cause a lithography printing defocus and poor line spacing resolution for the coil
turns closest to the pole-tip area. This factor increases the incidence of coil
shorting in this area which lowers the process yield.
However, by increasing the spacing of the outermost two or three turns in the
pole-tip area, shorts between the outermost turns are greatly reduced, and this
results in a much improved process yield.