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An arrangement of deflectors is proposed to eliminate E-Beam probe movement in electron beam chopping systems that use deflection across an aperture by a transversal electrical field.
English (United States)
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Electron Beam Chopping System Without Chopping Degradation
An arrangement of deflectors is proposed to eliminate E-Beam probe
movement in electron beam chopping systems that use deflection across an
aperture by a transversal electrical field.
An arrangement of 3 deflectors (1,6,7) is used. The E-Beam (2) is focused
on the plane of the chopping aperture (3) and deflected across this aperture by
the electrical field between the two plates (4) of deflector 1. As long as the
voltage applied to the plates is smaller than required for complete cut off, the
beam is deflected away from the electron optical axis (5). The E-Beam will be
deflected back onto the axis by deflector II (6) and deflector III (7). The
necessary voltages to be applied to these deflectors depend on the dimensions
of the deflection plates (1,6,7) and their separations and are proportional to the
deflector voltage V. They can be derived from V by sense resistors R1 and R2
which can be determined experimentally by minimizing probe motion as a
function of V.
This deflection arrangement is applicable to any electron optical system but is
especially suitable for systems with small numbers of crossovers, such as field