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A method as described for avoiding bow in a row of elements having a layer of another material deposited on only one side.
English (United States)
This text was extracted from a PDF file.
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A method as described for avoiding bow in a row of elements having a layer
of another material deposited on only one side.
A row 1 of elements produced on a substrate is lapped to produce a closely
controlled finish dimension.
It has been found that in cases in which the row of elements has a layer of
another material 2 on only one side of the row there is a tendency for the layer to
produce a bow in the row of elements. Row bow is considered undesirable since
any bow in the row of elements during lapping causes variations in the finish
dimension among the elements in the row.
It has been found that by making the layer 2 discontinuous, the row bow is
greatly reduced. For example, by producing the configuration shown in the lower
figure, in which a series of pads 3 are created from the layer 2 by the use of a
mask, the bow was reduced a much greater amount than could have been
predicted by the reduction in area of the layer 2.