A Simple Method for Visually Monitoring Line Width Variations
Original Publication Date: 1985-Jun-01
Included in the Prior Art Database: 2005-Feb-19
Darkfield Illumination (DI) of developed images in resist at low magnification can be used to detect linewidth differences. Observation of 0.5 - 1.0mM lines and spaces in approximately 1.5mM thick resist at l00X magnification in DI shows distinct coloration for different line/space combinations. These color changes are used to detect small differences in line space combinations.