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A Simple Method for Visually Monitoring Line Width Variations

IP.com Disclosure Number: IPCOM000065703D
Original Publication Date: 1985-Jun-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Hammer, WN [+details]

Abstract

Darkfield Illumination (DI) of developed images in resist at low magnification can be used to detect linewidth differences. Observation of 0.5 - 1.0mM lines and spaces in approximately 1.5mM thick resist at l00X magnification in DI shows distinct coloration for different line/space combinations. These color changes are used to detect small differences in line space combinations.