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Al/Cu Metal Skirt Removal Process

IP.com Disclosure Number: IPCOM000065721D
Original Publication Date: 1985-Jul-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Gajda, JJ Trudeau, FG [+details]

Abstract

The presented process removes Al/Cu stud metal skirts, bypassing the chrome layer, contacting the Pt/Si layer, causing glass delamination, low SBDVF and degraded BVEB junctions.