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Indexing Slide Mechanism for Metal Thickness Monitoring in an Evaporator

IP.com Disclosure Number: IPCOM000065723D
Original Publication Date: 1985-Jul-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Brown, WW Cosgrove, JF Sward, RK [+details]

Abstract

The mechanism presented accurately records individual film thicknesses in a multilayer evaporation process.