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Surface Cleaning Process for Oxidized Ti Surfaces

IP.com Disclosure Number: IPCOM000065778D
Original Publication Date: 1985-Aug-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Heurle, FD Iyer, SS Ting, CY [+details]

Abstract

This publication describes a process useful to clean Ti surfaces and to improve the rework capability for wafers.