Excimer Laser Patterning of Green Sheet Ceramics
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19
High performance packages needed for advanced computer systems require short, highly conductive, densely packed connecting paths between chips. A non-contact process has been developed whereby patterns can be etched in ceramic green sheets by direct excimer laser irradiation. This method uses an excimer laser and a patterning mask to form fine patterns by ablative decomposition of the green sheet polymer and removal of the ceramic particles dispersed in the sheet.