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Decal Backside Etch Tool

IP.com Disclosure Number: IPCOM000065813D
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Dewitt, JR Lamey, PJ [+details]

Abstract

The decal backside etch tool provides a means for securing a silicon and circuitized polyimide "sandwich" (known as a decal) to facilitate removal of the silicon by wet etching. The tool functions as an etchant dam so as to leave a silicon ring about the perimeter of the circular decal.