Decal Backside Etch Tool
Original Publication Date: 1985-Sep-01
Included in the Prior Art Database: 2005-Feb-19
The decal backside etch tool provides a means for securing a silicon and circuitized polyimide "sandwich" (known as a decal) to facilitate removal of the silicon by wet etching. The tool functions as an etchant dam so as to leave a silicon ring about the perimeter of the circular decal.