Microscopic Height Measurement System
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19
This disclosure describes a surface feature measurement system designed to cover a range of surface object sizes from several millimeters down to the micrometer range. The measurement system does not require physical contact with the surface. It is designed to measure both horizontal and vertical dimensions of the surface details within the design limits of the instrumentation to very high accuracies. The system is comprised of a scanning electron beam instrument (EBI) with appropriate data collection and manipulation equipment attached, the proper system controls, and parts-handling features required to accurately locate the specimen to be measured, with respect to the scanning head.