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A fixture for roughly orienting a semiconductor wafer within the field of view of an optical microscope is shown in the drawing.
English (United States)
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Microscope Wafer Orientation Fixture
A fixture for roughly orienting a semiconductor wafer within the field of view of
an optical microscope is shown in the drawing.
The fixture baseplate 10 is mounted on the microscope stage and moves
therewith in the vertical direction for focusing and in the X and Y directions, if the
microscope is so provided. Otherwise, the baseplate is moved with respect to the
The baseplate is provided with two or more sets of adapters for different
sizes of wafers. Each set consists of a wafer holder 15 (or 20) and a template
holder 25 (or 30).
Both the wafer holder and the template holder have orienting means, i.e.,
pins 16 and 17 and mating holes 16' and 17' for fixing the relativity of the wafer
and template both angularly and orthogonally in the X and Y directions. All
wafers are provided with a chordal flat and/or a notch for angular orientation.
A pointer affixed to the microscope overlies the template to permit a
corresponding area of the wafer to be examined as the fixture is translated to a
desired area, using the template as a coordinate address reference. Disclosed