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Microscope Wafer Orientation Fixture

IP.com Disclosure Number: IPCOM000065850D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Marino, FD Sackstein, SA Scully, RJ [+details]

Abstract

A fixture for roughly orienting a semiconductor wafer within the field of view of an optical microscope is shown in the drawing.