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A physical measurement system is shown which employs a laser and interferometer arrangement with an air bearing which defines the axis of translation for the corner cube and anvil.
English (United States)
This text was extracted from a PDF file.
This is the abbreviated version, containing approximately
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Laser Interferometric Physical Measurement System
A physical measurement system is shown which employs a laser and
interferometer arrangement with an air bearing which defines the axis of
translation for the corner cube and anvil.
The laser head 10 includes a laser, beamsplitter, reference corner cube and
The corner cube and anvil 11 are mounted to an air bearing 12. The device to
be measured 13 (a micrometer is shown) is held by a support block 14. The
laser head, air bearing and support block are fixedly held in a common axis by a
granite straightedge 15 which is supported in turn by a surface plate 16, jack 17
and rolls 18.
The jack 17 tilts the granite plate 15, becoming a sine- plate and controlling
the force applied by the anvil 11. The air bearing 12 supports the anvil in a
frictionless environment. Thus, the amount of the gauging force is shown by the
equation: x = w sin 0-f where x = gauging force w = weight of the air bearing side
0 = angle of tilt f = friction Note: Because the air bearing is a frictionless device, f
A common axis of measurement and translation to eliminate Abbe error is
accomplished by boring a hole through the entire length of the air bearing to
accommodate the measurement path of the laser beam. The measurement cube
is mounted at the far end of the bore and a precision ball contact is attached to it.
The laser beam, air bearing (translation), and micrometer are thus all in the same
axis. A constant gauging force...