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Laser Interferometric Physical Measurement System

IP.com Disclosure Number: IPCOM000065866D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Nunn, TP Roscoe, TR [+details]

Abstract

A physical measurement system is shown which employs a laser and interferometer arrangement with an air bearing which defines the axis of translation for the corner cube and anvil.