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Laser Etching Technique

IP.com Disclosure Number: IPCOM000065870D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Yeh, JT [+details]

Abstract

During the etching of polymers by disintegration with laser beams, detached particles can reattach to the surrounding surface. This may be due to reaction with the ambient atmosphere, such as burning in air, and produce an adhering, carbon containing debris. To avoid the contamination, the workpiece is first coated with a soluble protective coating, such as photoresist.