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Sputter Preclean Process for Vm Control of Josephson Junctions

IP.com Disclosure Number: IPCOM000065871D
Original Publication Date: 1985-Oct-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Yogi, T [+details]

Abstract

The maximum zero voltage Josephson current characteristic (Vm) of a Josephson device is controllable by selecting the appropriate preclean voltage and time of application of sputter precleaning of the substrate prior to deposition of the niobium electrode.