Variable Angle of Attack Bernoulli Turbine Gripper
Original Publication Date: 1985-Nov-01
Included in the Prior Art Database: 2005-Feb-19
A turbine gripper for holding planar shapes includes several recesses, each of which is fitted with an air nozzle. Referring to the figure, the base 10 of the gripper can be fabricated from a plastic material such as polyethylene. Recesses 12 are machined into the surface of base 10. Nozzles 14 are mounted within the recesses 12. Air blown outward toward the periphery of the base by the nozzles 14 creates low pressure areas within recesses 12, thereby providing pressure differentials which hold a planar shape such as a wafer. Nozzles 14 are rotatable so that a tangential force component can be generated by the air flow, thereby allowing a wafer to be held and rotated by the gripper as needed for processing. Varying the rotation of the nozzle 14 will allow variable speed of rotation of the wafer.