Browse Prior Art Database

Particle Isolation in Clean Rooms

IP.com Disclosure Number: IPCOM000065950D
Original Publication Date: 1985-Dec-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Stokes, KH [+details]

Abstract

In a vertical laminar flow clean room environment, vertical barriers are provided to isolate particle generating sources in a turbulence zone from the product(s) to be protected against contamination.