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Photomask Preparative Method

IP.com Disclosure Number: IPCOM000065999D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Block, ML [+details]

Abstract

Raw glass mask plates are cleaned and coated with 6000 angstroms of positive photoresist which is then dried by standard oven baking techniques. The resist-coated plates are then printed with a full scale fidelity test target or other desired pattern plate, and the resist is developed using standard manufacturing line practices.