Photomask Preparative Method
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
Raw glass mask plates are cleaned and coated with 6000 angstroms of positive photoresist which is then dried by standard oven baking techniques. The resist-coated plates are then printed with a full scale fidelity test target or other desired pattern plate, and the resist is developed using standard manufacturing line practices.