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Automatic Wafer Handling System For Electron Beam System Disclosure Number: IPCOM000066040D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue


Related People

Freisitzer, N Judge, RL ONeill, BC Pearson, ES Penzetta, FL Raver, CR [+details]


A mechanism is described to carry silicon wafers under computer control and with minimum contamination into and out of an electron beam system. During handling, the wafers are always maintained in a class 100 clean air environment.