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Split Beam Scanning Electron Microscope

IP.com Disclosure Number: IPCOM000066041D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Lanzaro, A [+details]

Abstract

A scanning electron microscope (SEM) uses a single electron beam to scan a target surface under observation. The scanning beam may be split into two beams by a high frequency square-wave displacement signal applied to beam deflection plates mounted with respect to the beam, as shown in the figure. If the square-wave deflection is in the direction of scan, and the back-scatter diode signals are multiplexed at the square-wave frequency creating a strobe effect, then a split beam SEM has been established. Two images are therefore created, with each image corresponding to a displacement polarity of the split beam. The images are displaced with respect to each other in proportion to the displacement between the beams.