Split Beam Scanning Electron Microscope
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
A scanning electron microscope (SEM) uses a single electron beam to scan a target surface under observation. The scanning beam may be split into two beams by a high frequency square-wave displacement signal applied to beam deflection plates mounted with respect to the beam, as shown in the figure. If the square-wave deflection is in the direction of scan, and the back-scatter diode signals are multiplexed at the square-wave frequency creating a strobe effect, then a split beam SEM has been established. Two images are therefore created, with each image corresponding to a displacement polarity of the split beam. The images are displaced with respect to each other in proportion to the displacement between the beams.