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Vacuum Processing Chamber Having Reversible Lid

IP.com Disclosure Number: IPCOM000066046D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Caulfield, JJ [+details]

Abstract

A vacuum processing chamber is described which is provided with a rotatable and reversible lid to permit access to wafers retained within the lid for loading, unloading and servicing. The vacuum chamber 12 is illustrated in Fig. 1 having a lid 14 which can be raised on pedestal 16 and swung away from the chamber toward the operator, as shown in phantom outline. In the new position, the lid can be inverted, as shown in Fig. 2, to expose the wafers to the operator for loading, unloading or servicing.