Discrete Device And Electromigration Monitor Design With Pad Sharing And Four-Point Probe Techniques For Product Test Site Chip
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
Pad conservation is important for semiconductor test site design. With fewer pads required for each monitor, more monitors can be included in the test site design and additional process and product information can be obtained. In addition, four-point probe technique is required for accurate device measurements. This technique provides an efficient method for reducing the number of pads required for each device and for retaining an accurate four-point probe strategy by means of pad sharing and special chip layout considerations. The drawing shows a schematic diagram employing this technique. The unique features of this method are described as follows: 1. Pad Sharing Technique The schematic diagram shows a layout involving five transistors, three Schottky barrier diodes (SBDs) and four resistors.