View Port For Scanning Electron Microscope
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
A scanning electron microscope (SEM) utilizes electrons accelerated by high voltage to produce cathode ray tube images of a specimen. In addition to secondary electrons produced by the specimen/electron beam interaction, characteristic specimen X-rays are also generated by the same interaction. In order to elementally analyze a specimen by X-rays, the specimen characteristic X-rays (energy) must be detected. An energy dispersive X-ray detector is required, and its relationship to the specimen is of critical importance.