Browse Prior Art Database

Isatins or Isatoic Anhydride Used to Sensitize Phenolic Resins

IP.com Disclosure Number: IPCOM000066121D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Hiraoka, H [+details]

Abstract

Phenolic resins, for example, the novolak and VARCUM* types, are well known in the art. It has now been found that such resins can be made much more sensitive to radiation, particularly deep ultraviolet light (254 nm) by incorporating in the resin isatin, or isatoic anhydride, or a substituted derivative of such a compound. The resulting compositions are useful as high resolution, high sensitivity, electron beam, X-ray or deep ultraviolet light resists in the negative mode. * Trademark of Reichhold Chemicals, Inc.