Isatins or Isatoic Anhydride Used to Sensitize Phenolic Resins
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
Phenolic resins, for example, the novolak and VARCUM* types, are well known in the art. It has now been found that such resins can be made much more sensitive to radiation, particularly deep ultraviolet light (254 nm) by incorporating in the resin isatin, or isatoic anhydride, or a substituted derivative of such a compound. The resulting compositions are useful as high resolution, high sensitivity, electron beam, X-ray or deep ultraviolet light resists in the negative mode. * Trademark of Reichhold Chemicals, Inc.