Vapor Deposition Of Thick Niobium Layers By Photoresistant Stripping
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
During vacuum deposition of niobium, the underlying layer of photoresist often develops cracks and peels-off under the intense heat radiation of the vapor source as well as the thermic stress in the niobium layer. This is particularly bothersome when the photoresist covers small lines and bridges only. It was found that a thin layer of niobium blanket deposited on the blanket photoresist before development renders the resist sufficiently stable against heat-up during subsequent deposition.