Browse Prior Art Database

Small Ion Sources For Large Area Ion Milling

IP.com Disclosure Number: IPCOM000066153D
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19

Publishing Venue

IBM

Related People

Authors:
Cuomo, JJ Harper, JME Kaufman, HR [+details]

Abstract

Ion milling for circuit pattern delineation has shown itself to be a powerful technique for obtaining fine-line structures. In the scale-up of magnetic bubble device fabrication to production volume, there is a need for devices to simultaneously ion mill many wafers with uniformity of a few percent thickness variation wafer-to-wafer.