Small Ion Sources For Large Area Ion Milling
Original Publication Date: 1979-Jan-01
Included in the Prior Art Database: 2005-Feb-19
Ion milling for circuit pattern delineation has shown itself to be a powerful technique for obtaining fine-line structures. In the scale-up of magnetic bubble device fabrication to production volume, there is a need for devices to simultaneously ion mill many wafers with uniformity of a few percent thickness variation wafer-to-wafer.